Chemical Vapor Deposition (CVD) Archives - Lam Research
WEBAtomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications. Advanced Memory, Advanced Packaging, Interconnect, Transistor.
Deposition - Lam Research
WEBTiny tungsten connectors and thin barriers are made with the precision of chemical vapor deposition (CVD) and atomic layer deposition (ALD), which adds only a few layers of atoms at a time.
VECTOR Product Family - Lam Research
WEBLam’s VECTOR ® PECVD products are designed to provide the performance and flexibility needed to create these enabling structures within a wide range of challenging device applications. For some applications, select models are also available through our Reliant ® Systems as refurbished products, providing lower cost of ownership with the ...
Lam Research - Wikipedia
WEBLam Research Corporation is an American supplier of wafer-fabrication equipment and related services to the semiconductor industry. [2] Its products are used primarily in front-end wafer processing, which involves the steps that create the active components of semiconductor devices (transistors, capacitors) and their wiring (interconnects).
A Beginner's Guide to Deposition
WEBOct 3, 2024 · Learn about various methods such as Chemical Vapor Deposition (CVD), Electrochemical Deposition (ECD), Physical Vapor Deposition (PVD), and more; and understand how these processes contribute to the fabrication of high-performance, high-density, and energy-efficient chips that power the AI era.
Tech Brief: A Look at Atomic Layer Deposition (ALD) - Lam Research …
WEBMay 15, 2017 · ALD is actually a type of chemical vapor deposition (CVD), one of the most common methods of producing thin films during chip-making. In CVD, gaseous “precursor” chemicals flow into a process chamber that contains the silicon wafer.
Advanced Packaging Furthers 3D Semi Structures ... - Lam Research …
WEBMay 20, 2024 · Lam’s VECTOR® products use one process called plasma-enhanced chemical vapor deposition (PECVD). PECVD deposition helps enable hybrid bonding, a key component for 3D advanced packaging.
Lam Research Investor Relations - Press Releases
WEBApr 16, 2009 · To address these challenges, Novellus (NASDAQ: NVLS) researchers have developed the CoolFill™ CVD tungsten plug fill process using the ALTUS® CVD system with Multi-Station Sequential Deposition (MSSD) architecture.
Lam Research Investor Relations - Press Releases
WEBAug 9, 2016 · Lam led the transition of chemical vapor deposition (CVD) tungsten nucleation to ALD tungsten nucleation with its PNL technology. The company continued that leadership by advancing low-resistivity tungsten solutions with its products ALTUS ® Max with PNLxT™, ALTUS ® Max with LRWxT™, and ALTUS ® …
Chemical Vapor Deposition Shower Head For Uniform Gas Distribution
WEBA Chemical Vapor Deposition (CVD) tool providing more even flow and distribution of reagent gasses over a substrate. The CVD tool includes a processing chamber and a shower head.
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